Liquid antimony pentachloride as oxidant for robust oxidative chemical vapor deposition of poly(3,4-ethylenedioxythiophene) films
نویسندگان
چکیده
The oxidative chemical vapor deposition (oCVD) process is investigated to produce poly (3,4-ethylenedioxythiophene) (PEDOT) thin films on 10 cm diameter Si wafers, involving the SbCl5 liquid oxidant. Process/structure/properties correlations are thoroughly studied, including influence of SbCl5/EDOT ratio, substrate temperature (Tsub), total pressure and duration, thickness, composition, morphology, spatial uniformity films, their electrical conductivity optical transmittance. increases by decreasing oxidant/EDOT ratio increasing temperature. Such increase results in decrease deposited mass thickness. Films improved pressure. Operating at 75 Pa equal uniform thickness substrates located all over chamber, proving potential PEDOT-SbCl5 oCVD be scaled up larger surfaces. absence post rinsing allows developing a full dry process, which interest coat sensitive can thus implemented for processing devices requiring durable, transparent, conductive PEDOT particular field optoelectronics.
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 2021
ISSN: ['1873-5584', '0169-4332']
DOI: https://doi.org/10.1016/j.apsusc.2021.149501